GP AlkaTex Plus
Additives to improve alkaline texturing of monocrystalline silicon wafers

Situation

Most types of wafers require a custom KOH/IPA recipe. This often results in an unstable texturing process. With GP AlkaTex Plus, the required recipes can be reduced to a basic recipe requiring little adjustment.

Advantages

  • Large process window, higher reproducibility and stability
  • Reduction of recipes to a basic recipe requiring little adjustment
  • Uniform arrangement of pyramids (edge length 2-5 μm, adjustable in the process)
  • Average reflection of 10.5 - 11.8% (400 - 1100 nm)
  • Reduced process time (to 20 min)
  • Increased tank life by up to 10,000 wafers or more
  • Improved cost of ownership
  • Increased efficiency, increased optical yield, and improved texture homogeneity

Download

  1. Data Sheet GP AlkaTex Plus 114_GP-AlkaTex-Plus_10v1.… (239 KB)