Situation
Situation
Most types of wafers require a custom KOH/IPA recipe. This often results in an unstable texturing process. With GP AlkaTex Plus, the required recipes can be reduced to a basic recipe requiring little adjustment.
Advantages
Advantages
- Large process window, higher reproducibility and stability
- Reduction of recipes to a basic recipe requiring little adjustment
- Uniform arrangement of pyramids (edge length 2-5 μm, adjustable in the process)
- Average reflection of 10.5 - 11.8% (400 - 1100 nm)
- Reduced process time (to 20 min)
- Increased tank life by up to 10,000 wafers or more
- Improved cost of ownership
- Increased efficiency, increased optical yield, and improved texture homogeneity



