Situation
In-line and off-line process controls let you rapidly identify and eliminate any problems that may arise. The GP 4-TEST Pro is a lab instrument, which combines several versatile applications. It accurately measures the emitter sheet resistance as well as line and contact resistance of the fingers. That makes the GP 4-TEST a reliable instrument for monitoring the diffusion, screen printing and firing processes. Since this device also determines resistivity, it can also classify input material.
Principle
- 4-point measuring system
- Tungsten carbide or rhodium coated test probes are available
- Transfer length method (TLM) used to determine contact resistance
Advantages
- Performs all types of resistance measurements
- High quality test probes for every application
- Keithley instruments for measuring electronics
- User-friendly software with extensive evaluation options
- MES interface for extended applications
Technical Data
Topic |
Description |
Samples to be measured |
- Mono- and multi-crystalline wafers - Square or pseudo square - Textured or non-textured surface - Diffused layer (n+p or p+n) - Edge isolated (plasma or single-side wet chemical) |
Wafer size |
125 … 210 mm |
Total cycle time |
approx. 10 sec |
System layout |
Measurement stage, measurement electronics and controller PC integrated in transportable 19” rack. |
Note: All technical details are subject to change without prior notice. Only technical specifications contained in an offer are binding.