Situation
A clear understanding of processes is essential in locating and minimizing faults in a production facility over the long term. Determining the topography of cells, wafers or other samples - printing screens, for instance - provides valuable information about the surface characteristics of measured objects, such as contact fingers, busbars, grooves, steps, or tool marks. The
GP TOPO-TEST can precisely determine the height, width, and displacement of scanned objects in a topography. That allows problems in printing, sawing and laser processes to be detected early and continually optimized.
Principle
- Optical scanning system (chromatic sensor)
- Scan rate up to 4 kHz allows fast line scans
Advantages
- A large and robust measuring table ensures precise measurements
- Numerous lines and diagonals can be scanned automatically
Technical Data
Topic |
Description |
System description |
Biaxial positioning stage with vertikal mounted sensor for measuring hight profiles |
Sensor type |
Chromatic Sensor |
Samples to be measured |
- Wafers at any stage of the process - Solar cells at any stage of the process - Print Screens |
Vertical Sensor resolution |
± 0,01 µm |
Spot size |
5 µm |
Scan modes |
- Line scan - Multi-Line-Scan - Special test modes for printed grids and print screens |
Scan range |
170 mm |
Lateral positioning |
± 0,1 µm |
Scan speed |
up to 20 mm/s (200 points per mm) |
Optional setups |
XL stage for measuring print screens |
Note: All technical details are subject to change without prior notice. Only technical specifications contained in an offer are binding.