WAFER INSPECTION
Integrated inspection systems for early detection of various wafer defects
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GP WAF-Q .CamInline vision inspection module for as-cut wafers

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GP NANO-D .ScanInline vision inspection module for micro crack detection

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GP TOPO-D .ScanFull-area topographic measurement to detect 3D defects

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WAF INSP TTVInline thickness, TTV, specific resistance and bow measuring system WMT/WLT

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IN-LIFEInline Lifetime Characterisation System WML/WLL











































































