Situation

The best solar cells are produced from the best wafers. GP WAF-Q .Cam is an innovative inspection system that reliably finds visual defects on as-cut wafers, regardless of whether they are surface contaminations, chipped edges, V-shaped breaks, chippings or geometric defects. GP WAF-Q .Cam then classifies the wafers into different quality categories according to their geometric and optical properties.

Principle

  • Optical measurement process
  • Stop-measurement

Advantages

  • Reliable and reproducible detection of defects on as-cut wafers
  • Quick feedback
  • Central recipe management and "copy-exact" process
  • Simple and fast calibration option
  • Constant calibration control

Technical Data

Topic

Description

Samples to be measured

- As-cut mono- and multicrystalline wafers

- Square or pseudo square

Wafer size

100 … 156 mm

Camera model

4M Matrix
optional 11M Matrix

Defect resolution

80 µm / 60 µm

Measured features

Edge lengths, rectangularity, diagonals, phase lengths and angle, chipping, V-breaks, intrusion length and depth, surface defects

Stand Still time

25 ms / 25 ms

Minimum cycle time

1 s

Machine interface
(automation)

- Parallel I/O

- Parallel I/O (combined with RS232 for WaferID info)

- Profibus

Data interface (to factory
network or automation)

XML via TCP/IP

Note: All technical details are subject to change without prior notice. Only technical specifications contained in an offer are binding.

User Interface

The GP WAF-Q .Cam reliably detects all visual defects with a significant reduction of crystal structures. The GP Solar Inspect software suite offers precise and flexible defect classification, making it easy to apply inspection criteria to the system.

Download

  1. Product Data Sheet 221_GP-WAF-Q-Cam_10v1.pdf (337 KB)